Predictive Modeling of TiN Coating Roughness

• Main Authors: Mohamad Jaya, Abdul Syukor, Mohd Hashim, Siti Zaiton, Haron, Habibollah, Muhamad, Mohd Razali, Abd. Rahman, Md. Nizam, Hasan Basari, Abd Samad
• Format: Article
• Language: English
• Published: Trans Tech Publication, Switzerland 2013
• Subjects: TJ Mechanical engineering and machinery
• Online Access: http://eprints.utem.edu.my/id/eprint/10670/1/Predictive_Modeling_of_TiN_Coating_Roughness.pdf; http://eprints.utem.edu.my/id/eprint/10670/; http://www.ttp.net
• Institution: Universiti Teknikal Malaysia Melaka

In this paper, an approach in modeling surface roughness of Titanium Nitrite (TiN) coating using Response Surface Method (RSM) is implemented. The TiN coatings were formed using Physical Vapor Deposition (PVD) sputtering process. N2 pressure, Argon pressure and turntable speed were selected as pro...