Modeling of TiN Coating Thickness Using RSM Approach

• Main Authors: Mohamad Jaya, Abdul Syukor, Mohd Hashim, Siti Zaiton, Haron, Habibollah, Muhamad, Muhd. Razali, Hasan Basari, Abd Samad, Abd. Rahman, Md. Nizam
• Format: Article
• Language: English
• Published: Trans tech Publication, Switzerland 2014
• Subjects: TJ Mechanical engineering and machinery
• Online Access: http://eprints.utem.edu.my/id/eprint/10673/1/Modeling_of_TiN_Coating_Thickness_Using_RSM_Approach.pdf; http://eprints.utem.edu.my/id/eprint/10673/
• Institution: Universiti Teknikal Malaysia Melaka

In this paper, modeling of Titanium Nitrite (TiN) coating thickness using Response Surface Method (RSM) is implemented. Insert cutting tools were coated with TiN using Physical Vapor Deposition (PVD) sputtering process. N2 pressure, Argon pressure and turntable speed were selected as process variab...