The Evaluation of a Locking Function For a Vertical Stage Electrostatic Actuator
The present paper validates the effectiveness of the characteristic switching as a locking function for a vertical motion multilayer thin electrostatic actuator supported by only lubricating oil. In the electrostatic actuator, the friction forces often deteriorate the response and positioning accura...
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| Main Author: | |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2014
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| Subjects: | |
| Online Access: | http://eprints.utem.edu.my/id/eprint/13537/1/paper_10033.pdf http://eprints.utem.edu.my/id/eprint/13537/ |
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| Institution: | Universiti Teknikal Malaysia Melaka |
| Language: | English |