Comparison of deposition methods of ZnO thin film on flexible substrate

Comparison of deposition methods of ZnO thin film on flexible substrate

This paper reports the effect of the different deposition methods towards the ZnO nanostructure crystal quality and film thickness on the polyimide substrate. The ZnO film has been deposited by using the spray pyrolysis technique, sol-gel and RF Sputtering. Different methods give a different nanostr...

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Bibliographic Details
Main Authors: M. Idris, A. A., Arsat, R., Ahmad, M. K., Sidek, F.
Format: Article
Language:English
Published: 2017
Subjects:
TA401-492 Materials of engineering and construction. Mechanics of materials
Online Access:http://eprints.uthm.edu.my/3705/1/AJ%202017%20%2895%29%20Comparison%20of%20deposition%20methods%20of%20ZnO.pdf
http://eprints.uthm.edu.my/3705/
http://doi.org/10.11591/ijeecs.v5.i3.pp536-541
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Institution: Universiti Tun Hussein Onn Malaysia
Language: English

Internet

http://eprints.uthm.edu.my/3705/1/AJ%202017%20%2895%29%20Comparison%20of%20deposition%20methods%20of%20ZnO.pdf
http://eprints.uthm.edu.my/3705/
http://doi.org/10.11591/ijeecs.v5.i3.pp536-541

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