Comparative study of infrared Nd:YAG pulsed laser radiation on Pt thin film

• Main Authors: Bhari, Bibi Zulaika, Ali, Ahmad Hadi, Isiyaku, Aliyu Kabiru, Ahmad, Rabiatul Adawiah
• Format: Article
• Language: English
• Published: UTHM Publisher 2017
• Subjects: TK7800-8360 Electronics
• Online Access: http://eprints.uthm.edu.my/4191/1/AJ%202017%20%28578%29.pdf; http://eprints.uthm.edu.my/4191/
• Institution: Universiti Tun Hussein Onn Malaysia

This paper investigated on infrared Nd:YAG pulsed laser radiation on platinum (Pt) thin films. Pt thin films were deposited on Si by DC magnetron sputtering. Then, the deposited thin films were radiated by infrared Nd:YAG pulse laser at different laser energy. The radiated thin films were analysed based on the electrical and surface morphological properties. Four-point probe measurement shows that, the lowest resistivity was recorded when the energy laser are 110-170 mJ. Surface morphology scanned by scanning electron microscope (SEM) revealed that the surface of sample with lowest resistivity after radiated with laser is smoother than the as-deposited thin films. After laser radiation, the grain sizes of thin films increases due to the grain agglomeration on the surface area.