A review: properties of silicon carbide materials in MEMS application

• Main Authors: Marsi, Noraini, Majlis, Burhanuddin Yeop, Mohd Yasin, Faisal, Zainal Abidin, Hafzaliza Erny, Hamzah, Azrul Azlan
• Format: Article
• Language: English
• Published: UNIMAP 2020
• Subjects: TP250-261 Industrial electrochemistry
• Online Access: http://eprints.uthm.edu.my/6333/1/AJ%202020%20%28814%29.pdf; http://eprints.uthm.edu.my/6333/
• Institution: Universiti Tun Hussein Onn Malaysia

The paper presents the review properties of silicon carbide materials in the MEMS application. The study aims to explore silicon carbide in MEMS technology which considers the development of microscale and integrated devices that combine electronics, electrical and mechanical elements. MEMS has beco...