Structural analysis of DLC thin film using x-ray reflectivity and Raman spectroscopy techniques
The characteristics of sputtered amorphous diamond-like carbon-containing copper (DLC: Cu films) films deposited on Si (100) substrates and Si (111) in argon gas-filled chamber using carbon target under different substrates deposition time, and RF power. The samples were deposited by RF magnetron sp...
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| Main Authors: | , , , |
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| Format: | Conference or Workshop Item |
| Published: |
2022
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| Subjects: | |
| Online Access: | http://eprints.utm.my/103826/ http://dx.doi.org/10.4028/p-x8wahl |
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| Institution: | Universiti Teknologi Malaysia |