An attention-augmented convolutional neural network with focal loss for mixed-type wafer defect classification.

• Main Authors: Batool, Uzma, Shapiai, Mohd. Ibrahim, Mostafa, Salama A., Ibrahim, Mohd. Zamri
• Format: Article
• Language: English
• Published: Institute of Electrical and Electronics Engineers Inc. 2023
• Subjects: Q Science (General); QC Physics
• Online Access: http://eprints.utm.my/104909/1/MohdIbrahimShapiai2023_AnAttentionAugmentedConvolutionalNeuralNetwork.pdf; http://eprints.utm.my/104909/; http://dx.doi.org/10.1109/ACCESS.2023.3321025
• Institution: Universiti Teknologi Malaysia

Silicon wafer defect classification is crucial for improving fabrication and chip production. Although deep learning methods have been successful in single-defect wafer classification, the increasing complexity of the fabrication process has introduced the challenge of multiple defects on wafers, wh...