Optical properties of diamond like carbon films prepared by DC-PECVD
Diamond-like carbon (DLC) thin films were deposited at different substrate temperatures using methane and hydrogen gas in DC-PECVD at 2x10-1Torr. From the light transmission using UV-VIS spectroscopy it was found that the optical transition had changed from allowed indirect transition to allowed dir...
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Main Authors: | , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
Ibnu Sina Institute for Fundamental Science Studies, Universiti Teknologi Malaysia
2012
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Subjects: | |
Online Access: | http://eprints.utm.my/id/eprint/29080/1/BakarIsmail2012_OpticalPropertiesOfDiamondLike.pdf http://eprints.utm.my/id/eprint/29080/ http://mjfas.ibnusina.utm.my/index.php/jfs/article/view/282 |
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Institution: | Universiti Teknologi Malaysia |
Language: | English |