Piezoresistive strain sensing using carbon nanotube forests suspended by Parylene-C membranes
We present a strain gauge that uses a carbon nanotube (CNT) forest, partially embedded in a Parylene-C membrane, as a piezoresistor. The device exhibits high sensitivity with a gauge factor of 4.52 or higher for strains up to ~1.5, offering much higher sensitivity in the strain range than those repo...
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| Main Authors: | , , , |
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| Format: | Article |
| Published: |
American Institute of Physics
2012
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| Subjects: | |
| Online Access: | http://eprints.utm.my/id/eprint/32986/ https://aip.scitation.org/doi/10.1063/1.4721460 |
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| Institution: | Universiti Teknologi Malaysia |
| Summary: | We present a strain gauge that uses a carbon nanotube (CNT) forest, partially embedded in a Parylene-C membrane, as a piezoresistor. The device exhibits high sensitivity with a gauge factor of 4.52 or higher for strains up to ~1.5, offering much higher sensitivity in the strain range than those reported for other types of CNT-forest/polymer composite piezoresistors. The gauge also shows a linear response to bending strains generated by forces applied perpendicularly to the membrane with a 55-ppm/mN sensitivity. These findings suggest promising characteristics for a variety of sensing applications of the CNT-forest/Parylene film. |
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