Morphological study of RF magnetron sputtered silicon thin films on aisi 304 stainless steel
Silicon thin films on AISI 304 stainless steel were deposited using RF magnetron sputtering. The effect of substrate temperature on the film properties were investigated as the films were prepared at different substrate temperature. Solid phase reaction between Si and Fe from the substr...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Penerbit UTM Press
2012
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| Subjects: | |
| Online Access: | http://eprints.utm.my/id/eprint/47250/1/ZulhelmiAlifHalim2012_MorphologicalStudyofRFMagnetron.pdf http://eprints.utm.my/id/eprint/47250/ |
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| Institution: | Universiti Teknologi Malaysia |
| Language: | English |