Aluminium-induced crystallization of silicon thin film by excimer laser annealing

• المؤلفون الرئيسيون: Ab. Razak, Siti Noraiza, Bidin, Noriah
• التنسيق: مقال
• منشور في: Sains Malaysiana 2013
• الموضوعات: Q Science
• الوصول للمادة أونلاين: http://eprints.utm.my/id/eprint/49013/; http://www.ukm.my/jsm/
• المؤسسة: Universiti Teknologi Malaysia

Polycrystalline silicon (poly-Si) film was fabricated by indirect process of re-crystallization of amorphous silicon (a-Si) thin film. This enhancement process is important to determine the performance of silicon thin film (STF). In this attempt, a fundamental study was carried out to enhance the cr...