Dielectric and structural properties of RF magnetron sputter grown lead zirconium titanate thin film: a review
This review summarizes the current state of lead zirconium titanate (PZT) that used for energy storage based organic capacitor. The particular focus is on dielectric material PZT properties for achieving high-k dielectric constant (900-1300) concerning for DC power application. PZT is well known of...
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| Main Authors: | , , |
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| Format: | Conference or Workshop Item |
| Published: |
2013
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| Subjects: | |
| Online Access: | http://eprints.utm.my/id/eprint/50989/ http://dx.doi.org/10.4028/www.scientific.net/AMR.667.312 |
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| Institution: | Universiti Teknologi Malaysia |