Predictive modeling of tin coating roughness

Predictive modeling of tin coating roughness

In this paper, an approach in modeling surface roughness of Titanium Nitrite (TiN) coating using Response Surface Method (RSM) is implemented. The TiN coatings were formed using Physical Vapor Deposition (PVD) sputtering process. N-2 pressure, Argon pressure and turntable speed were selected as proc...

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Bibliographic Details
Main Authors: Mohamad Jaya, Abdul Syukor, Mohd Hashim, Siti Zaiton, Haron, Habibollah, Muhamad, Muhd Razali, Abd Rahman, Md Nizam, Hassan Basari, Abd Samad
Format: Conference or Workshop Item
Published: 2013
Subjects:
QA75 Electronic computers. Computer science
Online Access:http://eprints.utm.my/id/eprint/51254/
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Institution: Universiti Teknologi Malaysia

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http://eprints.utm.my/id/eprint/51254/
http://apps.webofknowledge.com.ezproxy.utm.my/full_record.do?product=WOS&search_mode=GeneralSearch&qid=10&SID=R2Cjh3fA6kIeWhVr585&page=1&doc=2

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