Analysis of micropatterned wireless resonant heaters for wireless-control of MEMS thermal actuators

This paper reports a study on wireless radiofrequency (RF) power transfer to and heat generation in micropatterned coils for wireless control of thermally-driven microdevices. Inductor-capacitor circuits with the planar spiral coils act as RF receivers as well as frequency-sensitive wireless heaters...

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Bibliographic Details
Main Authors: Mohamed Ali, Mohamed Sultan, Yuan, Wang Ning, Takahata, Kenichi
Format: Article
Published: Springer-Verlag Berlin Heidelberg 2014
Subjects:
Online Access:http://eprints.utm.my/id/eprint/51837/
http://dx.doi.org/10.1007/s00542-013-1776-1
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Institution: Universiti Teknologi Malaysia