Pressure dependent tailored attributes of silicon nanoneedles grown by VHF plasma technique

Pressure dependent tailored attributes of silicon nanoneedles grown by VHF plasma technique

Gold (Au) catalysts assisted well-aligned silicon nanoneedles (SiNNs) are synthesized using very high frequency plasma enhanced chemical vapor deposition (VHF-PECVD) method. The tailored morphology and the optical reflectance of such NNs are inspected as a function of varying reactor pressure (200-8...

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Bibliographic Details
Main Authors: Mohammed, Y. H., Sakrani, S. B., Rohani, M. S.
Format: Article
Published: Academic Press 2016
Subjects:
TP Chemical technology
Online Access:http://eprints.utm.my/id/eprint/72448/
https://www.scopus.com/inward/record.uri?eid=2-s2.0-84964321082&doi=10.1016%2fj.spmi.2016.04.021&partnerID=40&md5=1fa79edea15dfa4ab28f95aa634f9131
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Institution: Universiti Teknologi Malaysia

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http://eprints.utm.my/id/eprint/72448/
https://www.scopus.com/inward/record.uri?eid=2-s2.0-84964321082&doi=10.1016%2fj.spmi.2016.04.021&partnerID=40&md5=1fa79edea15dfa4ab28f95aa634f9131

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