Diamond turning of soft semiconductors to obtain nanometric mirror surfaces
Diamond cutting is a viable alternative to grinding and polishing in the fabrication of high-quality soft semiconductors. Investigation of indentation provides useful information for understanding the practical diamond cutting process of brittle materials. Cutting forces and temperatures were analys...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Springer Verlag
2002
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| Subjects: | |
| Online Access: | http://eprints.utm.my/id/eprint/7388/1/VenkateshVC2003_DiamondTurningSoftSemiconductorObtain.pdf http://eprints.utm.my/id/eprint/7388/ http://dx.doi.org/10.1007/s001700200107 |
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| Institution: | Universiti Teknologi Malaysia |
| Language: | English |