The effect of RF-sputtering temperature of yittria-stabilized zirconia nanostructure electrolyte for SOFC application
Yttria-stabilized zirconia (YSZ) thin films were fabricated successfully using reactive RF magnetron sputtering. The substrate had been used are sapphire glass. A pure ceramic of Zr-Y is synthesized and processed into a planar magnetron target which is reactively sputtered with an Argon-Oxygen gas m...
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| Format: | Article |
| Published: |
Malaysian Journal of Catalysis
2018
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| Online Access: | http://eprints.utm.my/id/eprint/82235/ https://www.semanticscholar.org |
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| Institution: | Universiti Teknologi Malaysia |