Automated electrostatic discharge self-audit system in semiconductor industry
Electrostatic Discharge (ESD) is a well-known control process in semiconductor industries, military, medical industry, aerospace industry, oil and gas industry and so on. ESD means the collision between two elements with influence of humidity will createstatic charges. The static charge will be meas...
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| Main Authors: | , , |
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| Format: | Article |
| Published: |
Penerbit Akademia Baru
2020
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| Subjects: | |
| Online Access: | http://eprints.utm.my/id/eprint/87072/ http://dx.doi.org/10.37934/aram.65.1.2731 |
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| Institution: | Universiti Teknologi Malaysia |