Bias voltage dependent structure and morphology evolution of magnetron sputtered YSZ thin film: a basic insight

• Main Authors: Rusli, N. A., Muhammad, R., Ghoshal, S. K., Nur, H., Nayan, N., Jaafar, S. N.
• Format: Article
• Published: IOP Publishing Ltd. 2019
• Subjects: QC Physics
• Online Access: http://eprints.utm.my/id/eprint/87530/; http://dx.doi.org/10.1088/2053-1591/ab3907
• Institution: Universiti Teknologi Malaysia

YSZ thin films (YSZTFs) with controlled structure and morphology are desirable for low temperature solid oxide fuel cells (SOFCs). We report for the first time the bias voltage (40 V and 120 V) dependent structural and morphological evolution of YSZ thin films grown via radio frequency magnetron spu...