Size effects of poly-si formed by laser annealing with periodic intensity distribution on the tft characteristics

Currently, low-temperature polycrystalline silicon (LTPS) thin-film transistors (TFTs), which are characterized by high mobility of electrons, are fabricated by excimer laser annealing. High mobility in low-temperature polycrystalline silicon is achieved by controlling the grain size to approximatel...

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Bibliographic Details
Main Authors: Mizutani, A., Hamano, F., Nakamura, D., Goto, T., Aid, S. R., Ikenoue, H.
Format: Article
Language:English
Published: Institute of Electrical and Electronics Engineers Inc. 2021
Subjects:
Online Access:http://eprints.utm.my/id/eprint/95136/1/SitiRahmahAid2021_SizeEffectsofPolySiFormed.pdf
http://eprints.utm.my/id/eprint/95136/
http://dx.doi.org/10.1109/JEDS.2021.3094795
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Institution: Universiti Teknologi Malaysia
Language: English