MetalMUMPs resonator for acetone vapor sensing

Acetone vapor monitoring is essential in workplace for human health and safety, where exposure to acetone concentration more than 176 parts per million (ppm) can cause damage to eyes, liver, kidneys and central nervous system. In addition, acetone in exhaled breath is known to be good biomarker for...

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Main Authors: Rabih, A.A.S., Khir, M.H.M., Ahmed, A.Y., Mian, M.U., Dennis, J.O., Ahmed, M.G.A., Abdulgadir, A.-A.I.
Format: Article
Published: Institute of Electrical and Electronics Engineers Inc. 2017
Online Access:https://www.scopus.com/inward/record.uri?eid=2-s2.0-85039940040&doi=10.1109%2fRSM.2017.8069109&partnerID=40&md5=241104260ce14c22f52fe00c41692873
http://eprints.utp.edu.my/19996/
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Institution: Universiti Teknologi Petronas
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spelling my.utp.eprints.199962018-04-22T14:31:48Z MetalMUMPs resonator for acetone vapor sensing Rabih, A.A.S. Khir, M.H.M. Ahmed, A.Y. Mian, M.U. Dennis, J.O. Ahmed, M.G.A. Abdulgadir, A.-A.I. Acetone vapor monitoring is essential in workplace for human health and safety, where exposure to acetone concentration more than 176 parts per million (ppm) can cause damage to eyes, liver, kidneys and central nervous system. In addition, acetone in exhaled breath is known to be good biomarker for non-invasive screening of diabetes. The most common used acetone vapor sensors are based on metal oxide semiconductor sensors, which work at higher temperatures, and hence consume more power. This paper reports MetalMUMPs device for acetone vapor sensing for environmental monitoring. The device is based on electrothermal actuation and capacitive sensing using differential capacitance measurement technique. MS3110 universal capacitive readout circuit was used to readout the small change of the static capacitance when the device is actuated using 0.71 Vrms with a driving frequency range of 0.5 kHz-8 kHz. The output signal of the circuit is given as a voltage and it can be directly related to the capacitance change. The output voltage change was found to increase linearly with increasing the acetone vapor concentration from 100 ppm to 500 ppm with a concentration sensitivity of 0.65 mV/ppm. © 2017 IEEE. Institute of Electrical and Electronics Engineers Inc. 2017 Article PeerReviewed https://www.scopus.com/inward/record.uri?eid=2-s2.0-85039940040&doi=10.1109%2fRSM.2017.8069109&partnerID=40&md5=241104260ce14c22f52fe00c41692873 Rabih, A.A.S. and Khir, M.H.M. and Ahmed, A.Y. and Mian, M.U. and Dennis, J.O. and Ahmed, M.G.A. and Abdulgadir, A.-A.I. (2017) MetalMUMPs resonator for acetone vapor sensing. Proceedings of the 2017 IEEE Regional Symposium on Micro and Nanoelectronics, RSM 2017 . pp. 5-9. http://eprints.utp.edu.my/19996/
institution Universiti Teknologi Petronas
building UTP Resource Centre
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Teknologi Petronas
content_source UTP Institutional Repository
url_provider http://eprints.utp.edu.my/
description Acetone vapor monitoring is essential in workplace for human health and safety, where exposure to acetone concentration more than 176 parts per million (ppm) can cause damage to eyes, liver, kidneys and central nervous system. In addition, acetone in exhaled breath is known to be good biomarker for non-invasive screening of diabetes. The most common used acetone vapor sensors are based on metal oxide semiconductor sensors, which work at higher temperatures, and hence consume more power. This paper reports MetalMUMPs device for acetone vapor sensing for environmental monitoring. The device is based on electrothermal actuation and capacitive sensing using differential capacitance measurement technique. MS3110 universal capacitive readout circuit was used to readout the small change of the static capacitance when the device is actuated using 0.71 Vrms with a driving frequency range of 0.5 kHz-8 kHz. The output signal of the circuit is given as a voltage and it can be directly related to the capacitance change. The output voltage change was found to increase linearly with increasing the acetone vapor concentration from 100 ppm to 500 ppm with a concentration sensitivity of 0.65 mV/ppm. © 2017 IEEE.
format Article
author Rabih, A.A.S.
Khir, M.H.M.
Ahmed, A.Y.
Mian, M.U.
Dennis, J.O.
Ahmed, M.G.A.
Abdulgadir, A.-A.I.
spellingShingle Rabih, A.A.S.
Khir, M.H.M.
Ahmed, A.Y.
Mian, M.U.
Dennis, J.O.
Ahmed, M.G.A.
Abdulgadir, A.-A.I.
MetalMUMPs resonator for acetone vapor sensing
author_facet Rabih, A.A.S.
Khir, M.H.M.
Ahmed, A.Y.
Mian, M.U.
Dennis, J.O.
Ahmed, M.G.A.
Abdulgadir, A.-A.I.
author_sort Rabih, A.A.S.
title MetalMUMPs resonator for acetone vapor sensing
title_short MetalMUMPs resonator for acetone vapor sensing
title_full MetalMUMPs resonator for acetone vapor sensing
title_fullStr MetalMUMPs resonator for acetone vapor sensing
title_full_unstemmed MetalMUMPs resonator for acetone vapor sensing
title_sort metalmumps resonator for acetone vapor sensing
publisher Institute of Electrical and Electronics Engineers Inc.
publishDate 2017
url https://www.scopus.com/inward/record.uri?eid=2-s2.0-85039940040&doi=10.1109%2fRSM.2017.8069109&partnerID=40&md5=241104260ce14c22f52fe00c41692873
http://eprints.utp.edu.my/19996/
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