Study of damping effect on CMOS-MEMS resonator for biomarker detection in exhaled breath

Study of damping effect on CMOS-MEMS resonator for biomarker detection in exhaled breath

CMOS-MEMS resonators have found a broad usage in mass sensing applications. They can be used to detect biomarkers in exhaled breath (EB) for screening of diseases. Damping is believed to hinder the performance of these resonators. This paper focuses on investigating effects of damping in natural fre...

Full description

Saved in:
Bibliographic Details
Main Authors: Rabih, A.A.S., Dennis, J.O., Khir, M.H.Md., Ahmed, M.G.
Format: Article
Published: Institute of Electrical and Electronics Engineers Inc. 2017
Online Access:https://www.scopus.com/inward/record.uri?eid=2-s2.0-85012008377&doi=10.1109%2fICIAS.2016.7824037&partnerID=40&md5=740228e475a1a7e0c73ed91fb0aa167d
http://eprints.utp.edu.my/20171/
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: Universiti Teknologi Petronas

Internet

https://www.scopus.com/inward/record.uri?eid=2-s2.0-85012008377&doi=10.1109%2fICIAS.2016.7824037&partnerID=40&md5=740228e475a1a7e0c73ed91fb0aa167d
http://eprints.utp.edu.my/20171/

Similar Items