Analytical modelling of the effect of squeeze film damping on the frequency and quality factor of a poly MUMPs resonator

Analytical modelling of the effect of squeeze film damping on the frequency and quality factor of a poly MUMPs resonator

This paper reports analytical modelling of the squeeze film damping effect of a standard Polysilicon Multi-Users MEMS Process (Poly MUMPs) resonators. Poly MUMPs resonator has been designed for the purpose of gas detection. Generally, damping is present in all vibrating systems in the real world wit...

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Bibliographic Details
Main Authors: Algamili, A., Ahmed, A., Dennis, J., Khir, M., Mutharpavalar, A.
Format: Article
Published: Institute of Advanced Scientific Research, Inc. 2020
Online Access:https://www.scopus.com/inward/record.uri?eid=2-s2.0-85085321108&doi=10.5373%2fJARDCS%2fV12SP4%2f20201644&partnerID=40&md5=dfd4ef7f7e98a3e220bef9d0972ffa39
http://eprints.utp.edu.my/23095/
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Institution: Universiti Teknologi Petronas

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https://www.scopus.com/inward/record.uri?eid=2-s2.0-85085321108&doi=10.5373%2fJARDCS%2fV12SP4%2f20201644&partnerID=40&md5=dfd4ef7f7e98a3e220bef9d0972ffa39
http://eprints.utp.edu.my/23095/

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