Post micromachining of MPW based CMOS�MEMS comb resonator and its mechanical and thermal characterization
In recent years micro electro mechanical system (MEMS) based micro resonant sensors have been given a lot of attention due to their potential as a platform for the development of many novel physical, chemical, and biological sensors. That is why this paper covers post processing of the structures fa...
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| Main Authors: | , , , |
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| Format: | Article |
| Published: |
Springer Verlag
2016
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| Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-84937611316&doi=10.1007%2fs00542-015-2606-4&partnerID=40&md5=86f4b8d23666d8a0342eb1e8d82d3f19 http://eprints.utp.edu.my/25711/ |
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| Institution: | Universiti Teknologi Petronas |