Investigations on spatial distribution of low temperature plasma parameters using NiCr wire probe diagnostic

Investigations on spatial distribution of low temperature plasma parameters using NiCr wire probe diagnostic

This study investigated the workability of a NiCr wire probe diagnostic under low temperature plasma operating conditions. The aim of the work was to design and fabricate a triple Langmuir probe with NiCr alloy for measurements in low temperature rf plasmas. The spatial distribution of electron temp...

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Bibliographic Details
Main Authors: Naz, M.Y., Shukrullah, S., Sulaiman, S.A., Najeeb-Ur-Rehman, Khan, Y., Ghaffar, A., Ullah, S.
Format: Article
Published: Elsevier B.V. 2016
Online Access:https://www.scopus.com/inward/record.uri?eid=2-s2.0-84969939932&doi=10.1016%2fj.measurement.2016.05.047&partnerID=40&md5=3b5456da1ed085674a6242cc0d0adbaf
http://eprints.utp.edu.my/25840/
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Institution: Universiti Teknologi Petronas

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https://www.scopus.com/inward/record.uri?eid=2-s2.0-84969939932&doi=10.1016%2fj.measurement.2016.05.047&partnerID=40&md5=3b5456da1ed085674a6242cc0d0adbaf
http://eprints.utp.edu.my/25840/

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