Optical characterization of lorentz force based CMOS-MEMS magnetic field sensor

• Main Authors: Dennis, J.O., Ahmad, F., Md Khir, M.B., Hamid, N.H.B.
• Format: Article
• Published: MDPI AG 2015
• Online Access: https://www.scopus.com/inward/record.uri?eid=2-s2.0-84938233095&doi=10.3390%2fs150818256&partnerID=40&md5=1ae30df0d2c5aaf3ef4a3206c89f359c; http://eprints.utp.edu.my/25969/
• Institution: Universiti Teknologi Petronas

Magnetic field sensors are becoming an essential part of everyday life due to the improvements in their sensitivities and resolutions, while at the same time they have become compact, smaller in size and economical. In the work presented herein a Lorentz force based CMOS-MEMS magnetic field sensor i...