Modeling and simulation of polysilicon piezoresistors in a CMOS-MEMS resonator for mass detection
This paper reports modeling and simulation of polysilicon piezoresistors as sensing mechanism using commercial 0.35 μm complementary metal oxide semiconductor (CMOS) process. The CMOS-MEMS resonator is designed to detect change in mass. The designed piezoresistors are composed of two types; longitu...
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Main Authors: | , , , , |
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Format: | Conference or Workshop Item |
Published: |
Institute of Electrical and Electronics Engineers Inc.
2015
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Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-84963811379&doi=10.1109%2fRSM.2015.7354957&partnerID=40&md5=ea763e79eeded8040cad021e4666a13e http://eprints.utp.edu.my/26182/ |
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Institution: | Universiti Teknologi Petronas |