Design, modelling and testing of CMOS-MEMS switch

The Electro-Magnetic (EM) MEMS switches are playing an important role in our everyday life due to their high efficiency and system integrity. The design, modelling and testing of MEMS EM switch is presented in this research work. This chip-based MEMS switch is fabricated using 0.35 µm Complementar...

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Bibliographic Details
Main Authors: Ahmad, F., Amjad, W.A., Mehmood, F., Jan, M.T., Dennis, J.O., Khir, M.H.B.M.
Format: Article
Published: Springer Science and Business Media Deutschland GmbH 2021
Online Access:https://www.scopus.com/inward/record.uri?eid=2-s2.0-85105282330&doi=10.1007%2fs00542-021-05221-4&partnerID=40&md5=0d74311cb885adfa75c962c024449ccb
http://eprints.utp.edu.my/30351/
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Institution: Universiti Teknologi Petronas