Post micromachining of MPW based CMOS�MEMS comb resonator and its mechanical and thermal characterization

• Main Authors: Dennis, J.O., Ahmad, F., Khir, M.H.B.M., Hamid, N.H.B.
• Format: Article
• Published: Springer Verlag 2016
• Online Access: https://www.scopus.com/inward/record.uri?eid=2-s2.0-84937611316&doi=10.1007%2fs00542-015-2606-4&partnerID=40&md5=86f4b8d23666d8a0342eb1e8d82d3f19; http://eprints.utp.edu.my/30581/
• Institution: Universiti Teknologi Petronas

In recent years micro electro mechanical system (MEMS) based micro resonant sensors have been given a lot of attention due to their potential as a platform for the development of many novel physical, chemical, and biological sensors. That is why this paper covers post processing of the structures fa...