Modeling and simulation of two modes of vibration in MEMS devices based on embedded piezoresistors

Modeling and simulation of two modes of vibration in MEMS devices based on embedded piezoresistors

Piezoresistive effect is commonly used as transduction mechanism in microelectromechanical systems (MEMS) and Wheatstone bridge as readout circuit. This paper presents modeling and simulation of two modes of vibration in the MEMS device through embedded piezoresistors which are arranged in Wheatston...

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Bibliographic Details
Main Authors: Ahmad, F., Dennis, J.O., Khir, M.H.B.M., Bin Hamid, N.H., Yar, A.
Format: Conference or Workshop Item
Published: IEEE Computer Society 2014
Online Access:https://www.scopus.com/inward/record.uri?eid=2-s2.0-84906351322&doi=10.1109%2fICIAS.2014.6869496&partnerID=40&md5=6b23613466ecde564ce882d7e0e27d84
http://eprints.utp.edu.my/32099/
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Institution: Universiti Teknologi Petronas

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https://www.scopus.com/inward/record.uri?eid=2-s2.0-84906351322&doi=10.1109%2fICIAS.2014.6869496&partnerID=40&md5=6b23613466ecde564ce882d7e0e27d84
http://eprints.utp.edu.my/32099/

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