Fabrication of the Trapezoidal electrodes and Electrets material for electrostatic energy harvester
Conversion of the mechanical vibration into electrical energy has been found feasible with MEMS (Micro-Electro-Mechanical-System) electrostatic energy harvesting method. The electrostatic energy harvesting device is fabricated on a silicon wafer for use on miniaturize applications. This paper presen...
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| Main Authors: | , , |
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| Format: | Conference or Workshop Item |
| Published: |
2013
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| Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-84893553117&doi=10.1109%2fRSM.2013.6706459&partnerID=40&md5=012573835d07ee3f45b15162f6691def http://eprints.utp.edu.my/32680/ |
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| Institution: | Universiti Teknologi Petronas |