A CMOS-MEMS Nano-Newton Force Sensor for Biomedical Applications

• Main Authors: Md Khir, Mohd Haris, Qu, Hongwei
• Format: Conference or Workshop Item
• Published: 2010
• Subjects: TK Electrical engineering. Electronics Nuclear engineering
• Online Access: http://eprints.utp.edu.my/3442/1/A_CMOS-MEMS_Nano-Newton_Force_Sensor_for_Biomedical_Applications.pdf; http://eprints.utp.edu.my/3442/
• Institution: Universiti Teknologi Petronas

This paper reports the design and microfabrication of a CMOS-MEMS capacitive force sensor capable of nano-Newton out-of-plane force measurement. Sidewall and fringe capacitance formed by the multiple CMOS metal layers were utilized and fully differential sensing was enabled by common-centroid wiring...