Chemical Amplification of a Triphenylene Molecular Electron Beam Resist
Molecular resists, such as triphenylene derivatives, are small carbon rich molecules, and thus give the potential for higher lithographic resolution and etch durability, and lower line width roughness than traditional polymeric compounds. Their main limitation to date has been poor sensitivity. A...
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| Format: | Article |
| Published: |
2007
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| Subjects: | |
| Online Access: | http://eprints.utp.edu.my/502/2/Triphenylene.pdf http://eprints.utp.edu.my/502/ |
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| Institution: | Universiti Teknologi Petronas |