A CMOS MEMS Resonant Magnetic field Sensor with differential Electrostatic actuation and Capacitive sensing

• Main Authors: Ahmad, Farooq, Dennis , John Ojur, Md Khir, Mohd Haris, Hamid, Nor Hisham
• Format: Article
• Published: Trans Tech Publications, Switzerland 2011
• Subjects: TK Electrical engineering. Electronics Nuclear engineering
• Online Access: http://eprints.utp.edu.my/7166/1/JOURNAL_PAPER_1_%28F%29.pdf; http://www.scientific.net; http://eprints.utp.edu.my/7166/
• Institution: Universiti Teknologi Petronas

This paper is about CMOS MEMS resonant magnetic field sensor in which differential electrostatic actuation, capacitive sensing, resonant frequency, quality factor and sensitivity of interdigitated comb resonator is investigated. Information is embedded in the output signal frequency because it is ro...