Design, modeling and simulation of CMOS MEMS cantilever for carbon dioxide gas sensing

• Main Authors: Mirza,, Asif, Md Khir, Mohd Haris, Dennis , John Ojur, Ashraf, Khalid, Hamid, Nor Hisham
• Format: Article
• Published: IEEE Xplore 2011
• Subjects: TK Electrical engineering. Electronics Nuclear engineering
• Online Access: http://eprints.utp.edu.my/7174/1/stamp.jsp%3Ftp%3D%26arnumber%3D6088353%26tag%3D1; http://ieeexplore.ieee.org; http://eprints.utp.edu.my/7174/
• Institution: Universiti Teknologi Petronas

Carbon dioxide sensors have potential applications in medical diagnoses, health care, environmental monitoring, food and medicine industry. In recent years, many novel biological, physical and chemical sensors have employed microcantilevers due to their simplicity, ease of fabrication and integratio...