Finite Element Analysis of a Mass-Sensitive CMOS-MEMS Resonator using CoventorWare Simulation Software
The finite element analysis of a mass-sensitive CMOS-MEMS resonator using architect is presented in this paper. The principle of detection of the gaseous species is based on the change in resonant frequency of the microresonator as a result of the absorption/adsorption of an analyte molecule onto th...
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Main Authors: | , , , |
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Format: | Conference or Workshop Item |
Published: |
2012
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Subjects: | |
Online Access: | http://ieeexplore.ieee.org http://eprints.utp.edu.my/8799/ |
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Institution: | Universiti Teknologi Petronas |