Design, Modeling And Simulation Of CMOS-MEMS Piezoresistive Cantilever Based Carbon Dioxide Gas Sensor For Capnometry

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Bibliographic Details
Main Authors: Nor Hisham bin Hamid, Mohd Haris bin Md Khir
Format: Citation Index Journal
Published: 2012
Online Access:http://eprints.utp.edu.my/9042/
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Institution: Universiti Teknologi Petronas