Design and Simulation of Mass-sensitive Gas Sensor Based on CMOS-MEMS Resonator

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Bibliographic Details
Main Authors: John Ojur Dennis, Mohd Haris bin Md Khir, Mohamad Naufal bin Mohamad Saad
Format: Citation Index Journal
Published: 2012
Online Access:http://eprints.utp.edu.my/9736/
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Institution: Universiti Teknologi Petronas
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