MEMS vibratory gyroscopes: structural approaches to improve robustness

MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations. In part one, the dynamics of the...

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Main Authors: Acar, Cenk, Shkel, Andrei
Format: Book
Language:English
Published: Springer 2017
Subjects:
Online Access:http://repository.vnu.edu.vn/handle/VNU_123/31260
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Institution: Vietnam National University, Hanoi
Language: English
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spelling oai:112.137.131.14:VNU_123-312602020-06-19T09:18:59Z MEMS vibratory gyroscopes: structural approaches to improve robustness Acar, Cenk Shkel, Andrei Microelectromechanical systems ; TECHNOLOGY & ENGINEERING -- Technical & Manufacturing Industries & Trades 681.753 MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations. In part one, the dynamics of the vibratory gyroscope sensing element is developed, common micro-fabrication processes and methods commonly used in inertial sensor production are summarized, design of mechanical structures for both linear and torsional gyroscopes are presented, and electrical actuation and detection methods are discussed along with details on experimental characterization of MEMS gyroscopes. In part two, design concepts that improve robustness of the micromachined sensing element are introduced, supported by constructive computational examples and experimental results illustrating the material. 2017-04-19T06:18:35Z 2017-04-19T06:18:35Z 2009 Book 9780387095363 http://repository.vnu.edu.vn/handle/VNU_123/31260 en 260 p. application/pdf Springer
institution Vietnam National University, Hanoi
building VNU Library & Information Center
country Vietnam
collection VNU Digital Repository
language English
topic Microelectromechanical systems ; TECHNOLOGY & ENGINEERING -- Technical & Manufacturing Industries & Trades
681.753
spellingShingle Microelectromechanical systems ; TECHNOLOGY & ENGINEERING -- Technical & Manufacturing Industries & Trades
681.753
Acar, Cenk
Shkel, Andrei
MEMS vibratory gyroscopes: structural approaches to improve robustness
description MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations. In part one, the dynamics of the vibratory gyroscope sensing element is developed, common micro-fabrication processes and methods commonly used in inertial sensor production are summarized, design of mechanical structures for both linear and torsional gyroscopes are presented, and electrical actuation and detection methods are discussed along with details on experimental characterization of MEMS gyroscopes. In part two, design concepts that improve robustness of the micromachined sensing element are introduced, supported by constructive computational examples and experimental results illustrating the material.
format Book
author Acar, Cenk
Shkel, Andrei
author_facet Acar, Cenk
Shkel, Andrei
author_sort Acar, Cenk
title MEMS vibratory gyroscopes: structural approaches to improve robustness
title_short MEMS vibratory gyroscopes: structural approaches to improve robustness
title_full MEMS vibratory gyroscopes: structural approaches to improve robustness
title_fullStr MEMS vibratory gyroscopes: structural approaches to improve robustness
title_full_unstemmed MEMS vibratory gyroscopes: structural approaches to improve robustness
title_sort mems vibratory gyroscopes: structural approaches to improve robustness
publisher Springer
publishDate 2017
url http://repository.vnu.edu.vn/handle/VNU_123/31260
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