MEMS vibratory gyroscopes: structural approaches to improve robustness
MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations. In part one, the dynamics of the...
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oai:112.137.131.14:VNU_123-312602020-06-19T09:18:59Z MEMS vibratory gyroscopes: structural approaches to improve robustness Acar, Cenk Shkel, Andrei Microelectromechanical systems ; TECHNOLOGY & ENGINEERING -- Technical & Manufacturing Industries & Trades 681.753 MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations. In part one, the dynamics of the vibratory gyroscope sensing element is developed, common micro-fabrication processes and methods commonly used in inertial sensor production are summarized, design of mechanical structures for both linear and torsional gyroscopes are presented, and electrical actuation and detection methods are discussed along with details on experimental characterization of MEMS gyroscopes. In part two, design concepts that improve robustness of the micromachined sensing element are introduced, supported by constructive computational examples and experimental results illustrating the material. 2017-04-19T06:18:35Z 2017-04-19T06:18:35Z 2009 Book 9780387095363 http://repository.vnu.edu.vn/handle/VNU_123/31260 en 260 p. application/pdf Springer |
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Microelectromechanical systems ; TECHNOLOGY & ENGINEERING -- Technical & Manufacturing Industries & Trades 681.753 |
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Microelectromechanical systems ; TECHNOLOGY & ENGINEERING -- Technical & Manufacturing Industries & Trades 681.753 Acar, Cenk Shkel, Andrei MEMS vibratory gyroscopes: structural approaches to improve robustness |
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MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations.
In part one, the dynamics of the vibratory gyroscope sensing element is developed, common micro-fabrication processes and methods commonly used in inertial sensor production are summarized, design of mechanical structures for both linear and torsional gyroscopes are presented, and electrical actuation and detection methods are discussed along with details on experimental characterization of MEMS gyroscopes. In part two, design concepts that improve robustness of the micromachined sensing element are introduced, supported by constructive computational examples and experimental results illustrating the material. |
format |
Book |
author |
Acar, Cenk Shkel, Andrei |
author_facet |
Acar, Cenk Shkel, Andrei |
author_sort |
Acar, Cenk |
title |
MEMS vibratory gyroscopes: structural approaches to improve robustness |
title_short |
MEMS vibratory gyroscopes: structural approaches to improve robustness |
title_full |
MEMS vibratory gyroscopes: structural approaches to improve robustness |
title_fullStr |
MEMS vibratory gyroscopes: structural approaches to improve robustness |
title_full_unstemmed |
MEMS vibratory gyroscopes: structural approaches to improve robustness |
title_sort |
mems vibratory gyroscopes: structural approaches to improve robustness |
publisher |
Springer |
publishDate |
2017 |
url |
http://repository.vnu.edu.vn/handle/VNU_123/31260 |
_version_ |
1680967446905749504 |