Sensing microgripper with pid control systems
Recently, MEMS and NANO are considered very importance technologies in 21th century that play a key role for the development of modern electronic devices. It was only in the early 90s of previous century that significant work in the field of micro-electro-mechanical systems (MEMS) began. At pres...
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| Format: | Theses and Dissertations |
| Language: | other |
| Published: |
Đại học Quốc gia Hà Nội
2016
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| Subjects: | |
| Online Access: | http://repository.vnu.edu.vn/handle/VNU_123/8259 |
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| Institution: | Vietnam National University, Hanoi |
| Language: | other |
| Summary: | Recently, MEMS and NANO are considered very importance technologies in
21th century that play a key role for the development of modern electronic devices. It was
only in the early 90s of previous century that significant work in the field of micro-electro-mechanical systems (MEMS) began. At present, there is still a lack of tools for
manipulation of microstructures that are not directly accessible by the existing machines
or robots that handle macro objects. Therefore, the development of micro-tools for
handling and manipulating particles or small components (sized in the micrometer range)
with the applications envisioned in microassembly, microrobotics, single cell
manipulation and positioning, cell separation, minimally invasive and living cell surgery
continues to be a great technological challenge. The sensing microgripper is capable of
providing large jaw displacement and output sensing voltage is presented in [4]. This
device is able to monitor the jaw displacement and the resulting applied force. The device
is made on SOI silicon wafers with a fabrication process compatible with CMOS
technology. However, to commercialization this device, some additions research and
development need to be continued such as reducing the operation temperature for living
cell applications, improvement of accuracy in modeling, and its control system. This
thesis will be focused in designing, and simulation a control system for the sensing
microgripper based on a standard Bi-CMOS process. The target is built up a fully close-loop control manipulation system which is integrated on chip with the sensing
microgripper. |
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