Development of a simple 2.45 GHz microwave plasma with a repulsive double hexapole configuration

• Main Authors: Arciaga, Marko, Tumlos, Roy, Ulano, April M., Lee, Henry, Jr., Lledo, Rumar, Ramos, Henry
• Format: text
• Published: Animo Repository 2008
• Subjects: Microwave plasmas; Physics
• Online Access: https://animorepository.dlsu.edu.ph/faculty_research/11588
• Institution: De La Salle University

A simple and inexpensive 2.45 GHz microwave plasma source with a repulsive double hexapole configuration is described and characterized. In this work, the operation of the source is shown to be flexible in terms of electron density, electron temperature, and plasma uniformity even at low-pressures a...