Substrate temperature dependence of photoresponse and crystal phases of TiO2 deposited via dual planar magnetron
Light-sensitive TiO2 films are deposited on silicon via dual planar magnetron (DPM) without post-deposition annealing. The DPM configuration features a mirror reactive planar magnetron sputtering system essentially driving the plasma. The series of sputtering particles bouncing back and forth within...
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| Main Authors: | , , |
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| Format: | text |
| Published: |
Animo Repository
2014
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| Subjects: | |
| Online Access: | https://animorepository.dlsu.edu.ph/faculty_research/11593 |
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| Institution: | De La Salle University |