CMOS-MEMS resonator parametric variation analysis through equivalent circuit modeling

CMOS-MEMS resonator parametric variation analysis through equivalent circuit modeling

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Bibliographic Details
Main Authors: Mian, Muhammad Umer, Dennis, John Ojur, Khir, M Haris M, Sutri, Nebyu Yonas, Ahmed, Abdelaziz Yousif, Tang, Tong Boon
Format: Conference or Workshop Item
Published: 2016
Online Access:http://scholars.utp.edu.my/id/eprint/36549/
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Institution: Universiti Teknologi Petronas
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