Microstructural changes during precision machining of thin substrates
This paper reports investigations in machining of thin substrates with thickness less than 100μm. The machining process induces severe plastic deformation through the thickness of the machined thin workpiece due to the high ratio of the depth of cut to workpiece thickness. The diamond face turning i...
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Main Authors: | , |
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Other Authors: | |
Format: | Article |
Language: | English |
Published: |
2014
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Subjects: | |
Online Access: | https://hdl.handle.net/10356/100377 http://hdl.handle.net/10220/24110 |
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Institution: | Nanyang Technological University |
Language: | English |