Review of single image signal-to-noise ratio estimation for SEM image

• Main Authors: Sim, K. S., Nia, M. E., Tso, C. P.
• Other Authors: School of Mechanical and Aerospace Engineering
• Format: Article
• Language: English
• Published: 2014
• Subjects: Mechanical and Aerospace Engineering
• Online Access: https://hdl.handle.net/10356/101179; http://hdl.handle.net/10220/18594
• Institution: Nanyang Technological University

Scanning electron microscope (SEM) image signal-to-noise ratio (SNR) depends on the beam current, the materials present in the specimen, and the specimen topography. It is desirable to quantify the SNR in SEM images, as it is a parameter, along with spatial resolution, that quantifies the image qual...