Numerical simulation of non-ablative laser texturing of silicon surface with a continuous wave fiber laser

Numerical simulation of non-ablative laser texturing of silicon surface with a continuous wave fiber laser

Silicon is highly transparent to the infrared wavelength, so fiber laser with wavelength of 1090 nm is not regarded as a suitable tool for the purpose of ablation based surface texturing. However, we demonstrate, through finite element thermal analyses of laser irradiated surface, non-ablative textu...

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Main Authors: Farrokhi, Hamid, Zhou, Wei, Zheng, Hongyu, Li, Zhongli
Other Authors: School of Mechanical and Aerospace Engineering
Format: Article
Language:English
Published: 2014
Subjects:
DRNTU::Engineering::Mechanical engineering
Online Access:https://hdl.handle.net/10356/102867
http://hdl.handle.net/10220/19209
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Institution: Nanyang Technological University
Language: English
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spelling sg-ntu-dr.10356-1028672020-03-07T13:19:20Z Numerical simulation of non-ablative laser texturing of silicon surface with a continuous wave fiber laser Farrokhi, Hamid Zhou, Wei Zheng, Hongyu Li, Zhongli School of Mechanical and Aerospace Engineering DRNTU::Engineering::Mechanical engineering Silicon is highly transparent to the infrared wavelength, so fiber laser with wavelength of 1090 nm is not regarded as a suitable tool for the purpose of ablation based surface texturing. However, we demonstrate, through finite element thermal analyses of laser irradiated surface, non-ablative texturing of Si surface is possible if suitable laser power and dwell time are used to produce peak temperatures above 1250 K and below the Si melting point of 1690 K. Localized oxidation occurs in the temperature range and results in formation of regularly patterned bumps. 2014-04-10T03:22:27Z 2019-12-06T21:01:19Z 2014-04-10T03:22:27Z 2019-12-06T21:01:19Z 2014 2014 Journal Article Farrokhi, H., Zhou, W., Zheng, H., & Li, Z. (2014). Numerical simulation of non-ablative laser texturing of silicon surface with a continuous wave fiber laser. Journal of Computational and Theoretical Nanoscience, 11(1), 53-57. https://hdl.handle.net/10356/102867 http://hdl.handle.net/10220/19209 10.1166/jctn.2014.3316 en Journal of computational and theoretical nanoscience © 2014 American Scientific Publishers.
institution Nanyang Technological University
building NTU Library
country Singapore
collection DR-NTU
language English
topic DRNTU::Engineering::Mechanical engineering
spellingShingle DRNTU::Engineering::Mechanical engineering
Farrokhi, Hamid
Zhou, Wei
Zheng, Hongyu
Li, Zhongli
Numerical simulation of non-ablative laser texturing of silicon surface with a continuous wave fiber laser
description Silicon is highly transparent to the infrared wavelength, so fiber laser with wavelength of 1090 nm is not regarded as a suitable tool for the purpose of ablation based surface texturing. However, we demonstrate, through finite element thermal analyses of laser irradiated surface, non-ablative texturing of Si surface is possible if suitable laser power and dwell time are used to produce peak temperatures above 1250 K and below the Si melting point of 1690 K. Localized oxidation occurs in the temperature range and results in formation of regularly patterned bumps.
author2 School of Mechanical and Aerospace Engineering
author_facet School of Mechanical and Aerospace Engineering
Farrokhi, Hamid
Zhou, Wei
Zheng, Hongyu
Li, Zhongli
format Article
author Farrokhi, Hamid
Zhou, Wei
Zheng, Hongyu
Li, Zhongli
author_sort Farrokhi, Hamid
title Numerical simulation of non-ablative laser texturing of silicon surface with a continuous wave fiber laser
title_short Numerical simulation of non-ablative laser texturing of silicon surface with a continuous wave fiber laser
title_full Numerical simulation of non-ablative laser texturing of silicon surface with a continuous wave fiber laser
title_fullStr Numerical simulation of non-ablative laser texturing of silicon surface with a continuous wave fiber laser
title_full_unstemmed Numerical simulation of non-ablative laser texturing of silicon surface with a continuous wave fiber laser
title_sort numerical simulation of non-ablative laser texturing of silicon surface with a continuous wave fiber laser
publishDate 2014
url https://hdl.handle.net/10356/102867
http://hdl.handle.net/10220/19209
_version_ 1681042286957297664

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