Understanding of initial unstable contact behaviors of Au-to-Au microcontact under low contact force for micro- and nano-electromechanical system devices

• Main Authors: Qiu, Haodong, Wang, Hong, Ke, Feixiang
• Other Authors: School of Electrical and Electronic Engineering
• Format: Article
• Language: English
• Published: 2013
• Subjects: DRNTU::Engineering::Electrical and electronic engineering
• Online Access: https://hdl.handle.net/10356/103740; http://hdl.handle.net/10220/16908
• Institution: Nanyang Technological University

The Au-to-Au micro/nano-contact behavior in unstable contact region during the initial stage of contact formation has been experimentally investigated under low contact force. The experimental results reveal that the asperity deformation process, which is conventionally observed in the stable region...