Fabrication and characterization of a multichannel 3D thermopile for chip calorimeter applications

• Main Authors: Huynh, Tho Phuoc, Zhang, Yilei, Yehuda, Cohen
• Other Authors: School of Mechanical and Aerospace Engineering
• Format: Article
• Language: English
• Published: 2015
• Subjects: DRNTU::Engineering::Mechanical engineering::Control engineering
• Online Access: https://hdl.handle.net/10356/106679; http://hdl.handle.net/10220/25065
• Institution: Nanyang Technological University

Thermal sensors based on thermopiles are some of the most robust and popular temperature sensing technologies across industries and research disciplines. A chip calorimeter with a 3D thermopile layout with a large sensing area and multichannel capacity has been developed, which is highly desired for...