Fabrication and characterization of a multichannel 3D thermopile for chip calorimeter applications

• Main Authors: Huynh, Tho Phuoc, Zhang, Yilei, Yehuda, Cohen
• 其他作者: School of Mechanical and Aerospace Engineering
• 格式: Article
• 語言: English
• 出版: 2015
• 主題: DRNTU::Engineering::Mechanical engineering::Control engineering
• 在線閱讀: https://hdl.handle.net/10356/106679; http://hdl.handle.net/10220/25065

Thermal sensors based on thermopiles are some of the most robust and popular temperature sensing technologies across industries and research disciplines. A chip calorimeter with a 3D thermopile layout with a large sensing area and multichannel capacity has been developed, which is highly desired for...